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SPIE Advanced Lithography 2013
SPIE Advanced Lithography 2013

SPIE Advanced Lithography 2013

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world's premier semiconductor lithography conference and exhibition
Dates: Sunday, February 24, 2013 - Thursday, February 28, 2013
Venue: San Jose Convention Center, San Francisco, United States
SPIE Advanced Lithography is the world's premier semiconductor lithography conference and exhibition. The 2013 event is scheduled for 24-28 February, in San Jose, California.

Many of the industry's top semiconductor suppliers, integrators, and manufacturers take part in the annual SPIE Advanced Lithography exhibition. For 36 years SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications.

Featured technologies at Advanced Lithography include:

• Etch Technology for nanopatterning
• Lithography: immersion, double patterning, e-beam, EUV, optical/laser, RET
• Metrology, inspection, OPC, and process control
• Design and manufacturing software
• Materials and chemicals
• Imaging equipment
• Lasers
• Resist materials and processing
• Nano-imprint
• IC and chip fabrication
• Nanoscale imaging

Website: http://spie.org/
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Venues
San Jose McEnery Convention Center
150 West San Carlos, San Jose, San Jose CA
United States
Tel: +1-408-2959600
http://www.sanjose.org/
Organizers
SPIE - the international society for optics and photonics
1000 20th St. Bellingham WA 98225-6705 USA, Bellingham
United States
Tel: +1-360-676 3290
http://spie.org/
Future Dates:
SPIE Advanced Lithography 20152/22/2015 - 2/26/2015 San Francisco CA, United States
SPIE Advanced Lithography 20192/24/2019 - 2/28/2019 San Francisco CA, United States
SPIE Advanced Lithography 20202/23/2020 - 2/27/2020 San Francisco CA, United States
SPIE Advanced Lithography + Patterning 20224/24/2022 - 4/28/2022 San Jose CA, United States
SPIE Advanced Lithography + Patterning 20232/26/2023 - 3/2/2023 San Jose CA, United States
SPIE Advanced Lithography + Patterning 20242/25/2024 - 2/29/2024 San Jose CA, United States
SPIE Advanced Lithography + Patterning 2025 San Jose CA, United States
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