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SPIE Advanced Lithography + Patterning 2025
SPIE Advanced Lithography + Patterning 2025

SPIE Advanced Lithography + Patterning 2025

World's premier semiconductor lithography conference and exhibition
Dates: TBD
Venue: San Jose McEnery Convention Center, San Jose CA, United States
The SPIE Advanced Lithography + Patterning Symposium has been the showcase of the latest advances in lithography and patterning technology for over four decades. The technology landscape keeps on evolving to incubate more sophisticated and diversified information and computing technologies. The semiconductor technology sector, now in the More-than-Moore era, is facing more challenges that require holistic patterning solutions that involve a higher level of interactions among process technologies, devices, and system design sectors. The symposium will cover the full spectrum of the advances and challenges in state-of-the art lithography and integrated patterning technology through several topical conferences. Advances in areas of nano- and micro-patterning for semiconductor IC device applications will be presented in sessions covering optical lithography, extreme-UV (EUV) lithography, computational patterning, metrology/inspection, patterning materials, etch/deposition technology, and System-Design-Technology co-optimization. As novel patterning and non-IC lithography technologies, such as heterogenous wafer packaging, IoT devices including micro-machines and microsensors, AR/VR devices, FP Displays, have become more widely explored, related topics in these areas are also addressed.

Website: https://spie.org/x10942.xml
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Venues
San Jose McEnery Convention Center
150 West San Carlos, San Jose, San Jose CA
United States
Tel: +1-408-2959600
http://www.sanjose.org/
Organizers
SPIE - the international society for optics and photonics
1000 20th St. Bellingham WA 98225-6705 USA, Bellingham
United States
Tel: +1-360-676 3290
http://spie.org/
Previous Dates:
SPIE Advanced Lithography + Patterning 20242/25/2024 - 2/29/2024 San Jose CA, United States
SPIE Advanced Lithography + Patterning 20232/26/2023 - 3/2/2023 San Jose CA, United States
SPIE Advanced Lithography + Patterning 20224/24/2022 - 4/28/2022 San Jose CA, United States
SPIE Advanced Lithography 20202/23/2020 - 2/27/2020 San Francisco CA, United States
SPIE Advanced Lithography 20192/24/2019 - 2/28/2019 San Francisco CA, United States
SPIE Advanced Lithography 20152/22/2015 - 2/26/2015 San Francisco CA, United States
SPIE Advanced Lithography 20132/24/2013 - 2/28/2013 San Francisco, United States
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